How to select cleaning chemistry for FOUP / FOSB carriers
Select by carrier material (PC ESD / CBM ESD / PEI ESD differ in temperature and alkali tolerance), then by contaminant (particles / organics / ions / resist residue). SP-Clear covers this with 5 grades.
1Step 1: material tolerance
PC ESD is the most delicate: no hot alkali — pH 8.5–9.5 in SP-Clear Organic is already the safe ceiling, and with a carrier tolerance of about 80 °C the PreWash runs at 50–65 °C for margin. PEI ESD tolerates up to 150 °C, so the HighTemp grade (pH 9.5–10.5, 70–90 °C) applies. PFA/PTFE/PVDF take nearly any chemistry, allowing hot strong alkali (pH 12.8–13.2, 70–100 °C). Picking the wrong grade causes hazing and stress cracking.
2Step 2: match the contaminant
Particles → PreWash (neutral pH 6.5–7.5, 1:4, 50–65 °C for 3–8 min, foam height <5 mm for spray safety, surface tension <30 mN/m). Organics, VOC and resist outgassing → Organic (mildly alkaline pH 8.5–9.5, 55–75 °C for 5–10 min, HSP-validated RED = 0.59). Ion-driven contamination such as reticle-box haze → Mask (neutral, UPW dilution recommended, 40–60 °C, targeting ammonium/sulfate ions).
3Step 3: confirm process and equipment
Spray lines need low-foam grades (PreWash/Organic at <5 mm foam height); immersion/ultrasonic/megasonic allow more latitude. PFA carriers can use spray, immersion or ultrasonic (1:9, 5–15 min). All supplied as concentrates (5X for PreWash/Organic/HighTemp/Mask, 10X for PFA) with order codes in the SCP-PW / SCP-OG / SCP-HT / SCP-PFA families.
Need technical support or a sample?
Tell us your substrate, contamination and process conditions — our process engineers will recommend a grade and arrange sample validation.
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