ITO-E1

Technical Description

Introduction

ITO-E1 ITO Etchant (ITO-E1) is developed by SEMPURION for ITO glass as a Etching / Thinning product.Key advantage: Pattern etching of ITO for panels and touch; organic-acid route with excellent selectivity to glass, photoresist and black matrix.. Benchmarked against Parker / Zhipu ITO etchants. Key features: Organic-acid system is the mainstream industry route confirmed by vendors, patents and academic literature: chlorine-free, no metal-ion contamination, excellent selectivity to glass/photoresist/black matrix (ITO:photoresist selectivity >10:1), environmentally safe — already the large-scale replacement for traditional inorganic strong-acid etching; working concentration sits in the common commercial window so customers can qualify without adjustment; a classic inorganic-acid fast option is also offered with 2–3x higher etch rate for high-speed lines; etch-rate curve calibration available per customer ITO crystalline phase (amorphous/polycrystalline rates differ widely and calibration is required for stable production). Typical process: Option A: etch rate 30–60 nm/min at 40–45°C (acceptance recommended at 30–50 nm/min). Option B: fast etch 30–90 s at 30–40°C; rinse thoroughly after etching to remove residual ions; glass stays clear (weight loss <0.01% in 30 min); indium/tin waste liquor managed as hazardous waste.

Quick Specs

Features

Process & Usage