
SP-Clear PreWash
SP-Clear PreWash — Neutral Pre-Cleaner for FOUP/FOSB
Dedicated pre-cleaner for particle removal on FOUP/FOSB: concentrate diluted 1:4, neutral pH 6.5–7.5, chemical clean at 50–65 °C for 3–8 min, spray-safe with <5 mm foam
Technical Description
SP-Clear PreWash is the neutral pre-cleaner in SEMPURION's SP-Clear semiconductor cleaning series, dedicated to particle removal on FOUP/FOSB in PC ESD / CBM ESD / PEI ESD. It is a colorless clear concentrate diluted 1:4 (concentrate : DI water) — 1 part concentrate plus 4 parts DI water gives 5 parts working solution, with no heating or pre-dissolving.
The working solution is pH 6.5–7.5; the neutral system is fully safe for PC ESD. Recommended operating temperature is 50–65 °C, within the 80 °C FOUP material limit with headroom; cleaning takes 3–8 minutes depending on contamination. Foam height is below 5 mm (Ross-Miles), making it suitable for spray cleaning, and surface tension below 30 mN/m gives good wetting and penetration to help particles release from the carrier surface.
The standard process is: pre-rinse (DI water, 1–2 min) → chemical clean (50–65 °C, 3–8 min) → DI rinse (2–4 cycles, UPW recommended) → drying (spin + hot air / N₂ blow-off). The product is neutral and non-irritating; gloves are recommended, and it should not be stored with strong oxidisers. Packaging is 5 / 25 / 200 kg drums and 1000 kg IBC, stored sealed, cool and dry at 5–35 °C with a 12-month unopened shelf life.
Positioning & Scope
| Positioning | Dedicated pre-clean for particle removal on FOUP/FOSB |
| Suitable for | FOUP & FOSB in PC ESD / CBM ESD / PEI ESD |
| Form | Colorless clear liquid (concentrate) |
Dilution
| Ratio | Procedure | Working solution |
|---|---|---|
| 1 : 4 (concentrate : DI water) | 1 part concentrate + 4 parts DI water, stir until uniform | 5 parts working solution |
Example: 5 kg concentrate + 20 kg DI water = 25 kg working solution; 25 kg + 100 kg = 125 kg
Working-solution parameters
| Parameter | Value | Notes |
|---|---|---|
| pH | 6.5 – 7.5 | Neutral — fully safe for PC ESD |
| Operating temp. | 50 – 65 °C | FOUP material limit is 80 °C, leaving headroom |
| Cleaning time | 3 – 8 min | Adjust to contamination level |
| Foam height | < 5 mm | Ross-Miles method — safe for spray cleaning |
| Surface tension | < 30 mN/m | Good wetting and penetration |
Cleaning process
- 1Pre-rinse (DI water, 1 – 2 min)
- 2SP-Clear PreWash chemical clean (50 – 65 °C, 3 – 8 min)
- 3DI rinse (2 – 4 cycles, UPW)
- 4Drying (spin + hot air / N₂ blow-off)
Packaging & Storage
| Packaging | Drums 5 / 25 / 200 kg; IBC bulk 1000 kg |
| Order code | SCP-PW-05 / 25 / 200 | SCP-PW-1000 (IBC) |
| Storage | Sealed, cool and dry at 5 – 35 °C |
| Shelf life | 12 months (unopened) |
Safety notes
- ·Neutral and non-irritating; gloves recommended during handling
- ·Do not store together with strong oxidisers
- ·If it gets in the eyes, rinse with plenty of water for 15 minutes
- ·Dispose of waste liquid per local environmental regulations
Same series (SP-Clear)
The SP-Clear series is segmented by carrier material and contaminant type; used together it covers the full cleaning chain for FOUP / FOSB / PFA carriers / mask boxes.
Introduction
SP-Clear PreWash — Neutral Pre-Cleaner for FOUP/FOSB (SP-Clear PreWash) is developed by SEMPURION for Particle pre-cleaning of FOUP and FOSB in PC ESD / CBM ESD / PEI ESD; pre-wash step on high-cleanliness wet-process carrier cleaning lines as a Carrier / Wafer product.Key advantage: Dedicated pre-cleaner for particle removal on FOUP/FOSB: concentrate diluted 1:4, neutral pH 6.5–7.5, chemical clean at 50–65 °C for 3–8 min, spray-safe with <5 mm foam. Benchmarked against Industry-standard pre-cleaning for FOUP/FOSB, offered as a domestic alternative. Key features: Concentrate used at 1:4 (concentrate:DI water) with no heating or pre-dissolving; neutral pH 6.5–7.5, fully safe for PC ESD; working temperature 50–65 °C, inside the 80 °C FOUP material limit with headroom; cleaning time only 3–8 min, adjusted to contamination level; foam height <5 mm (Ross-Miles), safe for spray cleaning; surface tension <30 mN/m for good wetting and penetration. Typical process: Process: pre-rinse (DI water, 1–2 min) → SP-Clear PreWash chemical clean (50–65 °C, 3–8 min) → DI rinse (2–4 cycles, UPW) → drying (spin + hot air / N₂ blow-off). Dilution: 1 part concentrate + 4 parts DI water gives 5 parts working solution (example: 5 kg concentrate + 20 kg DI water = 25 kg). Packaging: 5 / 25 / 200 kg drums (SCP-PW-05/25/200), 1000 kg IBC (SCP-PW-1000); storage: sealed, cool and dry at 5–35 °C, 12 months unopened.
Quick Specs
Features
Concentrate used at 1:4 (concentrate:DI water) with no heating or pre-dissolving; neutral pH 6.5–7.5, fully safe for PC ESD; working temperature 50–65 °C, inside the 80 °C FOUP material limit with headroom; cleaning time only 3–8 min, adjusted to contamination level; foam height <5 mm (Ross-Miles), safe for spray cleaning; surface tension <30 mN/m for good wetting and penetration
Process & Usage
Process: pre-rinse (DI water, 1–2 min) → SP-Clear PreWash chemical clean (50–65 °C, 3–8 min) → DI rinse (2–4 cycles, UPW) → drying (spin + hot air / N₂ blow-off). Dilution: 1 part concentrate + 4 parts DI water gives 5 parts working solution (example: 5 kg concentrate + 20 kg DI water = 25 kg). Packaging: 5 / 25 / 200 kg drums (SCP-PW-05/25/200), 1000 kg IBC (SCP-PW-1000); storage: sealed, cool and dry at 5–35 °C, 12 months unopened
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