SP-Clear PFA
SP-Clear PFA — Strong-Alkali Cleaner for PFA Cassettes
Strong-alkali cleaning for PFA/PTFE/Teflon wafer carriers and cleaning baskets: 1:9 dilution, pH 12.8–13.2, clean at 70–100 °C for 5–15 min — spray, immersion or ultrasonic
Technical Description
SP-Clear PFA is the strong-alkali cleaner in SEMPURION's SP-Clear semiconductor cleaning series for PFA / PTFE / Teflon cassettes and cleaning baskets, and suits PFA / PTFE / PVDF carriers. Supplied as a colorless to light-yellow clear concentrate diluted 1:9 (concentrate : DI water) — 1 part concentrate plus 9 parts DI water gives 10 parts working solution.
The working solution is pH 12.8–13.2, a strong-alkali system fully tolerated by PFA. Recommended operating temperature is 70–100 °C, well inside the 160 °C PFA rating with ample margin; cleaning takes 5–15 minutes depending on contamination, and spray, immersion and ultrasonic methods all apply. Removal spectrum: photoresist residue (strong-alkali hydrolysis) excellent, organic contamination (hot alkali + FMEE) excellent, particles (chelator dispersion) excellent, silicone oil and grease (alkali saponification) excellent, and metal ions good via the EDTA + sodium gluconate chelation system.
⚠️ This is a strong alkali (pH ≈ 13): protective gloves, goggles and clothing are mandatory, and skin and eye contact must be avoided — it is severely corrosive. On skin contact rinse immediately with plenty of water for 15 minutes; on eye contact rinse at once and seek medical attention. Never mix with acids (exothermic reaction), and neutralise waste liquid before disposal. ⚠️ Not suitable for PC / aluminium / copper. Packaging is 5 / 25 / 200 kg drums; because strong alkali absorbs CO₂ it must be stored sealed, with a 6-month unopened shelf life.
Positioning & Scope
| Positioning | Strong-alkali cleaner for PFA / PTFE / Teflon cassettes and wafer carriers |
| Suitable for | Cassettes and wafer carriers in PFA / PTFE / PVDF |
| Form | Colorless to light-yellow clear liquid (concentrate) |
⚠️ Not for PC / aluminium / copper — strong alkali will corrode them
Dilution
| Ratio | Procedure | Working solution |
|---|---|---|
| 1 : 9 (concentrate : DI water) | 1 part concentrate + 9 parts DI water, stir until uniform | 10 parts working solution |
Working-solution parameters
| Parameter | Value | Notes |
|---|---|---|
| pH | 12.8 – 13.2 | Strongly alkaline — fully tolerated by PFA |
| Operating temp. | 70 – 100 °C | PFA is rated to 160 °C — ample margin |
| Cleaning time | 5 – 15 min | Adjust to contamination level |
| Cleaning method | Spray / immersion / ultrasonic | PFA supports all cleaning methods |
Contaminants addressed
| Contaminant | Removal | Notes |
|---|---|---|
| Photoresist residue | Excellent | Strong-alkali hydrolysis |
| Organic contamination | Excellent | Hot strong alkali + FMEE |
| Particles | Excellent | Chelator dispersion |
| Metal ions | Good | EDTA + sodium gluconate chelation |
| Silicone oil / grease | Excellent | Strong-alkali saponification |
Packaging & Storage
| Packaging | Drums 5 / 25 / 200 kg |
| Order code | SCP-PFA-05 / 25 / 200 |
| Storage | Store sealed (strong alkali absorbs CO₂) |
| Shelf life | 6 months (unopened) |
Safety notes
- ·Strongly alkaline, pH ≈ 13 — protective gloves, goggles and clothing are mandatory
- ·Avoid skin and eye contact — severely corrosive
- ·Skin contact: rinse immediately with plenty of water for 15 minutes
- ·Eye contact: rinse immediately with water and seek medical attention
- ·Do not mix with acids (exothermic reaction)
- ·Neutralise waste liquid before disposal per regulations
Same series (SP-Clear)
The SP-Clear series is segmented by carrier material and contaminant type; used together it covers the full cleaning chain for FOUP / FOSB / PFA carriers / mask boxes.
Introduction
SP-Clear PFA — Strong-Alkali Cleaner for PFA Cassettes (SP-Clear PFA) is developed by SEMPURION for Strong-alkali cleaning of PFA / PTFE / PVDF cassettes and cleaning baskets; high-cleanliness decontamination of wet-process carriers and consumables as a Carrier / Wafer product.Key advantage: Strong-alkali cleaning for PFA/PTFE/Teflon wafer carriers and cleaning baskets: 1:9 dilution, pH 12.8–13.2, clean at 70–100 °C for 5–15 min — spray, immersion or ultrasonic. Benchmarked against Industry-standard strong-alkali cleaning for PFA carriers, offered as a domestic alternative. Key features: Strong-alkali system at pH 12.8–13.2, fully tolerated by PFA; operating temperature 70–100 °C against a 160 °C PFA rating for ample margin; all cleaning methods supported — spray, immersion and ultrasonic; excellent removal of photoresist residue (strong-alkali hydrolysis), organic contamination (hot alkali + FMEE), particles (chelator dispersion) and silicone oil/grease (alkali saponification), with good removal of metal ions by EDTA + sodium gluconate chelation; ⚠️ not suitable for PC / aluminium / copper, which strong alkali corrodes. Typical process: Dilution: 1 part concentrate + 9 parts DI water gives 10 parts working solution; working pH 12.8–13.2, operating temperature 70–100 °C, cleaning time 5–15 min, by spray / immersion / ultrasonic. ⚠️ Strong alkali (pH ≈ 13): protective gloves, goggles and clothing are mandatory; never mix with acids (exothermic); neutralise waste before disposal per regulations. Packaging: 5 / 25 / 200 kg drums (SCP-PFA-05/25/200); store sealed because strong alkali absorbs CO₂ — 6 months unopened.
Quick Specs
Features
Strong-alkali system at pH 12.8–13.2, fully tolerated by PFA; operating temperature 70–100 °C against a 160 °C PFA rating for ample margin; all cleaning methods supported — spray, immersion and ultrasonic; excellent removal of photoresist residue (strong-alkali hydrolysis), organic contamination (hot alkali + FMEE), particles (chelator dispersion) and silicone oil/grease (alkali saponification), with good removal of metal ions by EDTA + sodium gluconate chelation; ⚠️ not suitable for PC / aluminium / copper, which strong alkali corrodes
Process & Usage
Dilution: 1 part concentrate + 9 parts DI water gives 10 parts working solution; working pH 12.8–13.2, operating temperature 70–100 °C, cleaning time 5–15 min, by spray / immersion / ultrasonic. ⚠️ Strong alkali (pH ≈ 13): protective gloves, goggles and clothing are mandatory; never mix with acids (exothermic); neutralise waste before disposal per regulations. Packaging: 5 / 25 / 200 kg drums (SCP-PFA-05/25/200); store sealed because strong alkali absorbs CO₂ — 6 months unopened
Need samples or datasheets?
Contact us for detailed specs, MSDS and sample support for SP-Clear PFA
Related Guides
Need technical support or a sample?
Tell us your substrate, contamination and process conditions — our process engineers will recommend a grade and arrange sample validation.
- Phone
- +86 769-82786068
- sales@sempurion.com
- Website
- www.sempurion.com
- Address
- Songshan Lake, Dongguan, Guangdong, China