SEM-1000 Semiconductor Wafer Dicing Fluid
Semiconductor & PackagingCarrier / Wafer

SEM-1000

SEM-1000 Semiconductor Wafer Dicing Fluid

Cleaning, lubrication, anti-corrosion and cooling in one — built for high-precision dicing of hard-brittle materials; less edge chipping, protects on-metal layout and pads, easy to rinse clean.

Technical Description

SEM-1000 is Shengpu Chemical's next-generation dicing fluid for high-precision wafer and advanced-packaging singulation. It couples cleaning, lubrication, anti-corrosion and cooling: efficient surfactants rapidly wet and disperse micron-scale silicon/brittle debris to avoid re-deposition scratches, while excellent spreading forms a continuous lubricating film at the blade–wafer interface that lowers friction and cuts edge chipping, micro-cracks and blade marks for better yield and cosmetics. A dedicated compound inhibitor passivates metal traces and pads electrochemically, balancing cleanliness with corrosion protection. Dilute with DI water at ~1:300 (adjust 1:100–1:500) and monitor conductivity (<150 µS/cm) for stable high-cleanliness operation; suitable for spray or immersion, with near-neutral, low-ionic residue for a clean post-dice surface. SEM-1000 has been validated across multiple semiconductor and advanced-packaging dicing lines and can be customized per line for concentration, packaging and stable domestic supply.

00

Why dicing needs a dedicated fluid

Dicing is a critical packaging step. As dies shrink and wafers get thinner, high-speed blade cutting raises three process challenges.

01

Particle contamination

Micron silicon powder clings to the wafer; residue risks fails and lowers reliability.

02

Thermal damage & stress

High-speed blade heat and stress can cause micro-cracks and delamination.

03

Metal corrosion risk

Metal traces tend to electrochemically corrode in process water, breaking circuits and cutting yield.

The dicing fluid plays the core role: efficient cooling, lubrication, cleaning and anti-corrosion in one — a quality guarantee for precision dicing.

A

New-generation high-efficiency dicing solution

SEM-1000 is purpose-built for high-precision wafer dicing — advanced surfactants and functional additives deliver cleaning + lubrication + anti-corrosion in one, a performance promise for precision manufacturing.

Higher yield

Superior cleaning and lubrication cut micro-crack and residue risk

Quality assurance

Long-lasting corrosion protection, consistent quality in harsh conditions

Cost optimisation

Scientifically optimised, efficient use, lower total cost

Easy to use

Simple dilution, fast line integration, great compatibility

B

Four core technical advantages

01

Cleaning & dispersing

Efficient surfactants lower surface tension, penetrate the cut area fast and wrap silicon powder to stop re-deposition.

02

Wetting & lubrication

A protective film forms fast at the blade/wafer interface, cutting friction, edge damage and micro-cracks.

03

Anti-corrosion

Built-in complex inhibitor adsorbs on metal first, blocking moisture/oxygen to break the electrochemical corrosion path.

04

Low conductivity, high safety

Diluted working fluid stays under 150 µS/cm, minimising corrosion risk and adding safety for precise chips.

C

Validated in real production lines

SEM-1000 has been validated in continuous mass production across multiple semiconductor and advanced-packaging dicing lines — the leap from lab to demanding industrial volume.

Long-term stability

Consistent under high-volume continuous runs; no product-caused quality drift or unscheduled stops across the validation window.

Customer recognition

Passed rigorous vendor admission and full inspection; strong continuous-process results and core-supplier status for dicing fluid.

Mass-production proof

Proven not only against lab specs but across the complexity of real industrial mass production.

01

Technical Specifications

AppearanceClear to slightly cloudy liquid (25 °C)
Density≈1.0 g/cm³ (25 °C)
Conductivity (1:200 DI, 25 °C)< 150 µS/cm
Recommended dilution1:300(纯水/去离子水)
Core functionWetting, corrosion protection & silicon-powder dispersion to improve dicing yield
Standard packaging1 gal (≈3.78 L) drum / 1000 kg IBC; custom available
Shelf life90 days (sealed, cool dry storage)
02

Performance & Verification

Cleaning comparison

Post-dice wafer surface(photos)

Control without fluid — residue, unclear streets
Control · debris residue, faint streets
With SEM-1000 — clean, crisp streets
With SEM-1000 · clean, dust-free(baseline from third-party evaluation photo)
  • Control (no fluid)Visible dust and indistinct streets; residue may affect downstream bonding.
  • With SEM-1000Crisp clean streets, dust-free, particle-free under microscope.
Corrosion & compatibility

Immersion before / after 8 h(micro)

Original sample before immersion
Before immersion
After 8 h in 1:500 dilution — no pitting/scale
After 8 h (1:500) · intact
  • ConditionChip in 1:500 dilution, 8 h — worst-case long contact.
  • ResultTraces, pads and substrate intact — no pitting, oxidation or damage; consistent under microscope.
03

Application, Packaging & Service

How to use

DiluteDilute with DI water (recommend 1:300) and mix well to avoid local concentration differences.
MixUse mechanical or magnetic stirring to homogenise.
Spray & maintainApply via dicing spray system; check concentration/purity daily and replenish on schedule.

Packaging

StandardSealed 1 gal (≈3.78 L) drum — R&D & small batch
Industrial1000 kg IBC tote — volume production, lower logistics cost
Custom5 gal / 200 L and more on request
Technical consultation · free sample testing · after-sales support

Introduction

SEM-1000 Semiconductor Wafer Dicing Fluid (SEM-1000) is developed by SEMPURION for High-precision dicing/singulation of semiconductor wafers and advanced packaging (incl. hard-brittle substrates); post-dicing rinse as a Carrier / Wafer product.Key advantage: Cleaning, lubrication, anti-corrosion and cooling in one — built for high-precision dicing of hard-brittle materials; less edge chipping, protects on-metal layout and pads, easy to rinse clean.. Benchmarked against Domestic and international semiconductor dicing fluids; a high-cleanliness, low-ionic system for DI-water dilution. Key features: Surfactants lower surface tension to wet and suspend micron-scale chip debris, preventing re-deposition scratches; films at the blade–wafer interface cut friction and edge chipping/micro-cracks; debris rinses cleanly with DI water, leaving a bright surface; a compound corrosion inhibitor electively passivates metal traces and pads during soaking; near-neutral, low-ionic dilution suits high-cleanliness dicing. Typical process: Dilute with deionized water, recommended from 1:300 (tune 1:100–1:500 by line); monitor dilution conductivity (<150 µS/cm); spray/immersion on dicing tools at room temperature; store sealed, cool and light-free.

Quick Specs

Benchmark
Domestic and international semiconductor dicing fluids; a high-cleanliness, low-ionic system for DI-water dilution
Application
High-precision dicing/singulation of semiconductor wafers and advanced packaging (incl. hard-brittle substrates); post-dicing rinse
Materials
Wafers/chips (Si & compound semiconductors); metal traces and bond pads

Features

Surfactants lower surface tension to wet and suspend micron-scale chip debris, preventing re-deposition scratches; films at the blade–wafer interface cut friction and edge chipping/micro-cracks; debris rinses cleanly with DI water, leaving a bright surface; a compound corrosion inhibitor electively passivates metal traces and pads during soaking; near-neutral, low-ionic dilution suits high-cleanliness dicing

Process & Usage

Dilute with deionized water, recommended from 1:300 (tune 1:100–1:500 by line); monitor dilution conductivity (<150 µS/cm); spray/immersion on dicing tools at room temperature; store sealed, cool and light-free

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